Handbook of silicon based MEMS materials and technologies [electronic resource] /
Veikko Lindroos ... [et al.].
- 1st ed.
- Amsterdam ; Boston : William Andrew/Elsevier, 2010.
- xxxii, 636 p. : ill.
- Micro & nano technologies .
- Micro & nano technologies. .
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Electronic books.
TK7875 / .H36 2010eb
Includes bibliographical references and index.
Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.
Microelectromechanical systems.
Microelectromechanical systems--Materials.
Silicon--Electric properties.
Electronic books.
TK7875 / .H36 2010eb