| 000 -LEADER |
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| fixed length control field |
02189nam a22004093i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
EBC30553626 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
MiAaPQ |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20240322153304.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr cnu|||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
231028s2023 xx o ||||0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9789180752428 |
| Qualifying information |
(electronic bk.) |
|
|---|
| Cancelled/invalid ISBN |
9789180752411 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(MiAaPQ)EBC30553626 |
|
|---|
| System control number |
(Au-PeEL)EBL30553626 |
|
|---|
| System control number |
(OCoLC)1382693725 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
MiAaPQ |
| Language of cataloging |
eng |
| Description conventions |
rda |
| -- |
pn |
| Transcribing agency |
MiAaPQ |
| Modifying agency |
MiAaPQ |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Li, Xiao. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Toward Energy-Efficient Physical Vapor Deposition : |
| Remainder of title |
Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
1st ed. |
| 264 #1 - |
|---|
| -- |
Link�oping : |
| -- |
Linkopings Universitet, |
| -- |
2023. |
|
|---|
| -- |
�2023. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource (60 pages) |
| 336 ## - |
|---|
| -- |
text |
| -- |
txt |
| -- |
rdacontent |
| 337 ## - |
|---|
| -- |
computer |
| -- |
c |
| -- |
rdamedia |
| 338 ## - |
|---|
| -- |
online resource |
| -- |
cr |
| -- |
rdacarrier |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Link�oping Studies in Science and Technology. Dissertations Series ; |
| Volume number/sequential designation |
v.2328 |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Intro -- COVER: -- ABSTRACT -- POPUL�ARVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers. |
| 588 ## - |
|---|
| -- |
Description based on publisher supplied metadata and other sources. |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2023. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. |
| 655 #4 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic books. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Display text |
Print version: |
| Main entry heading |
Li, Xiao |
| Title |
Toward Energy-Efficient Physical Vapor Deposition |
| Place, publisher, and date of publication |
Link�oping : Linkopings Universitet,c2023 |
| International Standard Book Number |
9789180752411 |
| 797 2# - LOCAL ADDED ENTRY--CORPORATE NAME (RLIN) |
|---|
| Corporate name or jurisdiction name as entry element |
ProQuest (Firm) |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Link�oping Studies in Science and Technology. Dissertations Series |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
https://ebookcentral.proquest.com/lib/kliuc-ebooks/detail.action?docID=30553626 |
| Public note |
Click to View |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
E-book |
