Database needs for modeling and simulation of plasma processing (Record no. 79407)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01536nam a2200313 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | ebr10056959 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | CaPaEBR |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr cn||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 961029s1996 dcu sb 100 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| Canceled/invalid LC control number | 96070732 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Cancelled/invalid ISBN | 0309055911 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | CaPaEBR |
| Transcribing agency | CaPaEBR |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)647367525 |
| 050 14 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | .D374 1996eb |
| 245 00 - TITLE STATEMENT | |
| Title | Database needs for modeling and simulation of plasma processing |
| Medium | [electronic resource] / |
| Statement of responsibility, etc | Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Washington, D.C. : |
| Name of publisher, distributor, etc | National Academy Press, |
| Date of publication, distribution, etc | 1996. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 64 p. ; |
| Dimensions | 28 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | The compass series |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references. |
| 533 ## - REPRODUCTION NOTE | |
| Type of reproduction | Electronic reproduction. |
| Place of reproduction | Palo Alto, Calif. : |
| Agency responsible for reproduction | ebrary, |
| Date of reproduction | 2009. |
| Note about reproduction | Available via World Wide Web. |
| -- | Access may be limited to ebrary affiliated libraries. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors |
| General subdivision | Design and construction |
| Form subdivision | Congresses. |
| Topical term or geographic name as entry element | Plasma engineering |
| General subdivision | Databases |
| Form subdivision | Congresses. |
| Topical term or geographic name as entry element | Plasma engineering |
| General subdivision | Computer simulation |
| Form subdivision | Congresses. |
| 655 #7 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Electronic books. |
| Source of term | local |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | ebrary, Inc. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Compass series (Washington, D.C.) |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://site.ebrary.com/lib/kliuc/Doc?id=10056959 |
| Public note | An electronic book accessible through the World Wide Web; click to view |
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