Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
By: Ree, Moonhor.
Contributor(s): Yoon, Jinhwan | Heo, Kyuyoung | ebrary, Inc.
Material type:
BookSeries: Nanotechnology science and technology series: Publisher: Hauppauge, N.Y. : Nova Science Publishers, c2010Description: 67 p. : ill.Subject(s): Dielectric films | Microelectronics -- Materials | Porous materials | Interconnects (Integrated circuit technology)Genre/Form: Electronic books.DDC classification: 621.381 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Collection | Call number | URL | Copy number | Status | Date due | Item holds |
|---|---|---|---|---|---|---|---|---|
E-book
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IUKL Library | Subscripti | http://site.ebrary.com/lib/kliuc/Doc?id=10675006 | 1 | Available |
Total holds: 0
Includes bibliographical references (p. [51]-61) and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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