Nanofabrication using focused ion and electron beams [electronic resource] : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
Contributor(s): Utke, Ivo | Moshkalev, Stanislav | Russell, Phillip | ProQuest (Firm).
Material type: BookSeries: Nanomanufacturing series ; v. 1.Publisher: Oxford ; New York : Oxford University Press, 2011Description: xvi, 813 p.Subject(s): Nanostructured materials | Nanotechnology | Electron beams -- Industrial applications | Ion bombardment -- Industrial applicationsGenre/Form: Electronic books.DDC classification: 620.1/15 Online resources: Click to ViewItem type | Current location | Collection | Call number | URL | Copy number | Status | Date due | Item holds |
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E-book | IUKL Library | Subscripti | https://ebookcentral.proquest.com/lib/kliuc-ebooks/detail.action?docID=886626 | 1 | Available |
Total holds: 0
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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