Wafer Fabrication : Automatic Materiel Handling System.
By: Zhang, Jie.
Contributor(s): Staff, Huazhong University of Science and Technology.
Material type:
BookPublisher: Berlin/Boston : De Gruyter, Inc., 2018Copyright date: �2018Description: 1 online resource (284 pages).Content type: text Media type: computer Carrier type: online resourceISBN: 9783110487473.Subject(s): Semiconductor wafers-Automatic control | Manufacturing processes-Automatic controlGenre/Form: Electronic books.DDC classification: 621.39/5 Online resources: Click to View | Item type | Current location | Collection | Call number | URL | Copy number | Status | Date due | Item holds |
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E-book
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IUKL Library | Subscripti | https://ebookcentral.proquest.com/lib/kliuc-ebooks/detail.action?docID=5574735 | 1 | Available |
Intro -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2019. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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