Fluorinated SiC CVD.
By: Stenberg, Pontus.
Material type: BookSeries: Link�oping Studies in Science and Technology. Dissertations Series: Publisher: Link�oping : Linkopings Universitet, 2017Copyright date: �2017Edition: 1st ed.Description: 1 online resource (59 pages).Content type: text Media type: computer Carrier type: online resourceISBN: 9789176855911.Genre/Form: Electronic books.Online resources: Click to ViewItem type | Current location | Collection | Call number | Copy number | Status | Date due | Item holds |
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E-book | IUKL Library | Subscripti | 1 | Available |
Intro -- ABSTRACT -- POPUL�ARVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS.
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Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2023. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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