MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
Contributor(s): Beeby, Stephen | ebrary, Inc.
Material type: BookSeries: Microelectromechanical systems series: Publisher: Boston : Artech House, c2004Description: x, 269 p. : ill.Subject(s): Microelectromechanical systems | DetectorsGenre/Form: Electronic books.DDC classification: 681/.2 Online resources: An electronic book accessible through the World Wide Web; click to viewNo physical items for this record
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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