| 000 | 01451nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | ebr10055392 | ||
| 003 | CaPaEBR | ||
| 007 | cr cn||||||||| | ||
| 008 | 911004s1991 dcua s 000 0 eng | ||
| 010 | _z 91066812 | ||
| 020 | _z0309045975 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)43475627 | ||
| 050 | 1 | 4 |
_aTA2005 _b.N37 1991eb |
| 082 | 0 | 4 |
_a621.044 _220 |
| 110 | 2 |
_aNational Research Council (U.S.). _bPanel on Plasma Processing of Materials. |
|
| 245 | 1 | 0 |
_aPlasma processing of materials _h[electronic resource] : _bscientific opportunities and technological challenges / _cPanel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 |
_aWashington, D.C. : _bNational Academy Press, _c1991. |
||
| 300 |
_axii, 75 p. : _bill. |
||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
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| 650 | 0 | _aPlasma engineering. | |
| 650 | 0 |
_aMicroelectronics _xMaterials _xEffect of radiation on. |
|
| 650 | 0 | _aSurfaces (Technology) | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/kliuc/Doc?id=10055392 _zAn electronic book accessible through the World Wide Web; click to view |
| 942 |
_2lcc _cEBK |
||
| 999 |
_c151496 _d151496 |
||