000 01316nam a2200313Ia 4500
001 ebr10255526
003 CaPaEBR
007 cr cn|||||||||
008 030711s2003 enka sb 001 0 eng d
020 _z1860943519
040 _aCaPaEBR
_cCaPaEBR
035 _a(OCoLC)646768329
050 1 4 _aQC176.84.R3
_bG65 2003eb
100 1 _aGonz�alez-Elipe, A. R.
245 1 0 _aLow energy ion assisted film growth
_h[electronic resource] /
_cA.R. Gonz�alez-Elipe, F. Yubero, J.M. Sanz.
260 _aLondon :
_bImperial College Press ;
_aSingapore ;
_aRiver Edge, NJ :
_bDistributed by World Scientific,
_cc2003.
300 _axiv, 283 p. :
_bill.
504 _aIncludes bibliographical references and index.
533 _aElectronic reproduction.
_bPalo Alto, Calif. :
_cebrary,
_d2009.
_nAvailable via World Wide Web.
_nAccess may be limited to ebrary affiliated libraries.
650 0 _aThin films
_xDesign and construction.
650 0 _aThin films
_xEffect of radiation on.
650 0 _aIon bombardment.
655 7 _aElectronic books.
_2local
700 1 _aYubero, F.
700 1 _aSanz, J. M.
_q(Jos�e Mar�ia)
710 2 _aebrary, Inc.
856 4 0 _uhttp://site.ebrary.com/lib/kliuc/Doc?id=10255526
_zAn electronic book accessible through the World Wide Web; click to view
999 _c37311
_d37311