IUKL Library
Gonz�alez-Elipe, A. R.

Low energy ion assisted film growth [electronic resource] / A.R. Gonz�alez-Elipe, F. Yubero, J.M. Sanz. - London : Singapore ; River Edge, NJ : Imperial College Press ; Distributed by World Scientific, c2003. - xiv, 283 p. : ill.

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.




Thin films--Design and construction.
Thin films--Effect of radiation on.
Ion bombardment.


Electronic books.

QC176.84.R3 / G65 2003eb
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