Low energy ion assisted film growth [electronic resource] / A.R. Gonz�alez-Elipe, F. Yubero, J.M. Sanz.
By: Gonz�alez-Elipe, A. R.
Contributor(s): Yubero, F | Sanz, J. M. (Jos�e Mar�ia) | ebrary, Inc.
Material type:
BookPublisher: London : Singapore ; River Edge, NJ : Imperial College Press ; Distributed by World Scientific, c2003Description: xiv, 283 p. : ill.Subject(s): Thin films -- Design and construction | Thin films -- Effect of radiation on | Ion bombardmentGenre/Form: Electronic books.Online resources: An electronic book accessible through the World Wide Web; click to view
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Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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