| 000 -LEADER |
|---|
| fixed length control field |
01451nam a2200313 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
ebr10055392 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
CaPaEBR |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
|---|
| fixed length control field |
cr cn||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
911004s1991 dcua s 000 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| Canceled/invalid LC control number |
91066812 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Cancelled/invalid ISBN |
0309045975 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
CaPaEBR |
| Transcribing agency |
CaPaEBR |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)43475627 |
| 050 14 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TA2005 |
| Item number |
.N37 1991eb |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.044 |
| Edition number |
20 |
| 110 2# - MAIN ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
National Research Council (U.S.). |
| Subordinate unit |
Panel on Plasma Processing of Materials. |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Plasma processing of materials |
| Medium |
[electronic resource] : |
| Remainder of title |
scientific opportunities and technological challenges / |
| Statement of responsibility, etc |
Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Washington, D.C. : |
| Name of publisher, distributor, etc |
National Academy Press, |
| Date of publication, distribution, etc |
1991. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 75 p. : |
| Other physical details |
ill. |
| 533 ## - REPRODUCTION NOTE |
|---|
| Type of reproduction |
Electronic reproduction. |
| Place of reproduction |
Palo Alto, Calif. : |
| Agency responsible for reproduction |
ebrary, |
| Date of reproduction |
2013. |
| Note about reproduction |
Available via World Wide Web. |
| -- |
Access may be limited to ebrary affiliated libraries. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Plasma engineering. |
|
|---|
| Topical term or geographic name as entry element |
Microelectronics |
| General subdivision |
Materials |
| -- |
Effect of radiation on. |
|
|---|
| Topical term or geographic name as entry element |
Surfaces (Technology) |
| 655 #7 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic books. |
| Source of term |
local |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
ebrary, Inc. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://site.ebrary.com/lib/kliuc/Doc?id=10055392 |
| Public note |
An electronic book accessible through the World Wide Web; click to view |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
E-book |
