Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
By: National Research Council (U.S.). Panel on Plasma Processing of Materials.
Contributor(s): ebrary, Inc.
Material type:
BookPublisher: Washington, D.C. : National Academy Press, 1991Description: xii, 75 p. : ill.Subject(s): Plasma engineering | Microelectronics -- Materials -- Effect of radiation on | Surfaces (Technology)Genre/Form: Electronic books.DDC classification: 621.044 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Collection | Call number | URL | Copy number | Status | Date due | Item holds |
|---|---|---|---|---|---|---|---|---|
E-book
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IUKL Library | Subscripti | http://site.ebrary.com/lib/kliuc/Doc?id=10055392 | 1 | Available |
Total holds: 0
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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