Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
Contributor(s): Lindroos, Veikko | ebrary, Inc.
Material type: BookSeries: Micro & nano technologies: Publisher: Amsterdam ; Boston : William Andrew/Elsevier, 2010Edition: 1st ed.Description: xxxii, 636 p. : ill.Subject(s): Microelectromechanical systems | Microelectromechanical systems -- Materials | Silicon -- Electric propertiesGenre/Form: Electronic books.Online resources: An electronic book accessible through the World Wide Web; click to viewItem type | Current location | Collection | Call number | URL | Copy number | Status | Date due | Item holds |
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E-book | IUKL Library | Subscripti | http://site.ebrary.com/lib/kliuc/Doc?id=10378866 | 1 | Available |
Total holds: 0
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
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